CHANDLER, Ariz.– SpeedFam-IPEC Inc. today rolled out a suite of CMP processes for its universal tool in chemical mechanical planarization, which is called Momentum. The new processes of record cover 0 ...
Chemical mechanical planarization (CMP) toolmaker SpeedFam-IPEC Inc. today took the wraps off the 300mm version of its Momentum orbital hard platen polishing system, following the introduction of its ...
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